张建国,颜秀文.热处理对Pt-PtRh13薄膜热电偶绝缘层性能的影响及机理分析[J].航空发动机,2015,41(4):84-87
热处理对Pt-PtRh13薄膜热电偶绝缘层性能的影响及机理分析
Effects of Heat Treatment on Performance of Pt-PtRh13 Thin-film Thermocouple Insulating Layer and Its Mechanism Analyzing
  
DOI:
中文关键词:  薄膜热电偶  Pt-PtRh13  离子束溅射  热处理  温度稳定性  航空发动机
英文关键词:thin-film thermocouple  Pt-PtRh13  ion beam sputtering  heat treatment  thermal stability  aeroengine
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作者单位E-mail
张建国,颜秀文 中国电子科技集团公司第四十八研究所长沙410111 zhangjg@cs48.com 
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中文摘要:
      为了测量航空发动机高温部件表面温度,利用离子束溅射镀膜技术制备了拥有多层薄膜结构的Pt-PtRh13薄膜热电偶,包括Ni 基合金基底、NiCrAlY黏结层、Al2O3过渡层、Al2O3绝缘层、Pt/PtRh13薄膜热电偶和Al2O3保护层。研究了热处理对Pt-PtRh13薄膜热电偶绝缘层性能的影响,并利用扫描电子显微镜(SEM)、X 射线衍射分析(XRD)等手段对薄膜热电偶绝缘层性能下降的机理进行了分析。研究结果表明:利用Al2O3绝缘薄膜开发的Pt-PtRh13薄膜热电偶只用于900 ℃以下测温,在900 ℃以上长时间应用可能会出现测温不稳定问题,高温诱发Al2O3绝缘层发生晶型转变是主要原因。
英文摘要:
      In order to measure surface temperature of aeroengine high temperature components, Pt-PtRh13 thin-film thermocouples are fabricated by ion beam sputtering technique. The samples are multi-layer structures which are composed of Ni-based super alloy substrates NiCrAlY buffer layerAl2O3 layer Al2O3 insulating layerPt-PtRh13 thin-film thermocouple and Al2O3 protecting layer. The effects of heat treatment on the properties of Pt-PtRh13 thin-film thermocouple insulating layer and the degradation mechanism about Al2O3 insulating layer were analyzed using SEMXRD. The results show that Pt-PtRh13 thin-film thermocouple using Al2O3 insulating layer are compliant with measuring surface temperature below 900° and maybe cause instability trouble when using in more than 900°environment longtime. High temperature is the main reason that induces crystal phase transition of Al2O3 insulating layer.
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